| Title: | VLSI TECHNOLOGY |
| Authors: | S.m. Sze, Editor |
| Material Type: | printed text |
| Publisher: | New York NY : McGraw-Hill Book Company, 1983 |
| Series: | McGraw-Hill Series in Electrical Engineering |
| ISBN (or other code): | 978-0-07-062686-7 |
| Size: | xvi-654 p. / 25 cm |
| Languages: | English |
| Class number: | TECH (TECHNIQUES ET INSTRUMENTATION) |
| Keywords | Crystal growth , Epitaxy , Metal films , Oxidation |
Copies (1)
| Barcode | Call number | Media type | Location | Section | Status | Commentaire |
|---|---|---|---|---|---|---|
| 009323 | TECH3 SZE | papier | CNRS | TECH (TECHNIQUES ET INSTRUMENTATION) | Available |
