| Title: | NANOFABRICATION HANDBOOK |
| Authors: | Stefano Cabrini, Editor ; Satoshi Kawata, Editor |
| Material Type: | printed text |
| Publisher: | Boca Raton FL : CRC Press, 2012 |
| ISBN (or other code): | 978-1-4200-9052-9 |
| Size: | xvi-518 p. / 29 cm |
| Languages: | English |
| Class number: | TECH (TECHNIQUES ET INSTRUMENTATION) |
| Keywords | Handbook , Nanostructure , Pattern , Photolithography , X-rays |
Copies (1)
| Barcode | Call number | Media type | Location | Section | Status | Commentaire |
|---|---|---|---|---|---|---|
| 009279 | TECH1 CAB | papier | CNRS | TECH (TECHNIQUES ET INSTRUMENTATION) | Available |
