| Title: | FUNDAMENTALS OF SILICON INTEGRATED DEVICE TECHNOLOGY : Volume I. Oxidation, diffusion and epitaxy |
| Authors: | R.m. Burger, Editor ; R.p. Donovan, Editor |
| Material Type: | printed text |
| Publisher: | Englewood NJ : Prentice-Hall, 1967 |
| Series: | Solid State Physical Electronics Series |
| Size: | xvi-496 p. / 25 cm |
| Languages: | English |
| Class number: | MATE (MATERIAUX) |
| Keywords | Diffusion , Epitaxy , Oxidation , Silicon |
Copies (1)
| Barcode | Call number | Media type | Location | Section | Status | Commentaire |
|---|---|---|---|---|---|---|
| 000832 | MATE3 BUR1 | papier | CNRS | MATE (MATERIAUX) | Available |
