| Title: | HANDBOOK OF SEMICONDUCTOR MANUFACTURING TECHNOLOGY : Second edition |
| Authors: | Robert Doering, Editor ; Yoshio Nishi, Editor |
| Material Type: | printed text |
| Edition statement: | 2nd ed. |
| Publisher: | Boca Raton FL : CRC Press, 2008 |
| ISBN (or other code): | 978-1-57444-675-3 |
| Size: | pag. mult. / 26 cm |
| Languages: | English |
| Class number: | PMC (PHYSIQUE DU SOLIDE) |
| Keywords | Chemical vapour deposition , Deposition , Handbook , Materials , Oxidation , Semiconductors |
Copies (1)
| Barcode | Call number | Media type | Location | Section | Status | Commentaire |
|---|---|---|---|---|---|---|
| 008095 | PMC8 DOE | papier | CNRS | PMC (PHYSIQUE DU SOLIDE) | Available |
