| Title: | MATERIALS SCIENCE IN MICROELECTRONICS : The relationships between thin film processing and structure |
| Authors: | E.s. Machlin, Author |
| Material Type: | printed text |
| Publisher: | Croton-on-Hudson NY : Giro Press, 1995 |
| ISBN (or other code): | 978-1-878857-07-1 |
| Size: | xii-228 p. / 24 cm |
| Languages: | English |
| Class number: | MATE (MATERIAUX) |
| Keywords | Amorphous , Crystals , Stress , Thin films |
Copies (1)
| Barcode | Call number | Media type | Location | Section | Status | Commentaire |
|---|---|---|---|---|---|---|
| 008072 | MATE3 MAC | papier | CNRS | MATE (MATERIAUX) | Available |
