| Title: | PROCEDES CHIMIQUES DE DEPOT A PARTIR D'UNE PHASE GAZEUSE |
| Authors: | Yves Pauleau, Author |
| Material Type: | printed text |
| Publisher: | Paris : Hermès science publications, 2004 |
| ISBN (or other code): | 978-2-7462-0948-0 |
| Size: | 415 p. / 24 cm |
| Languages: | French |
| Class number: | MATE (MATERIAUX) |
| Keywords | Chemical vapour deposition , Layered structures , Plasma , Thin films |
Copies (1)
| Barcode | Call number | Media type | Location | Section | Status | Commentaire |
|---|---|---|---|---|---|---|
| 007524 | MATE3 PAU | papier | CNRS | MATE (MATERIAUX) | Available |
