| Title: | LOW DIELECTRIC CONSTANT MATERIALS FOR IC APPLICATIONS : With 163 figures |
| Authors: | P.s. Ho, Editor ; J. Leu, Editor ; W.w. Lee, Editor |
| Material Type: | printed text |
| Publisher: | Berlin : Springer, 2003 |
| Series: | Springer Series in Advanced Microelectronics, num. 9 |
| ISBN (or other code): | 978-3-540-67819-9 |
| Size: | xx-309 p. / 25 cm |
| Languages: | English |
| Class number: | MATE (MATERIAUX) |
| Keywords | Dielectrics , Insulators , Materials science |
Copies (1)
| Barcode | Call number | Media type | Location | Section | Status | Commentaire |
|---|---|---|---|---|---|---|
| 007443 | MATE4 HO | papier | CNRS | MATE (MATERIAUX) | Available |
