| Title: | HANDBOOK OF MICROLITHOGRAPHY, MICROMACHINING AND MICROFABRICATION : Volume 1: Microlitography |
| Authors: | P. Rai-Choudhury, Editor |
| Material Type: | printed text |
| Publisher: | Washington/London : SPIE/IEE, 1997 |
| Series: | IEE Materials and Devices Series, num. 12 |
| ISBN (or other code): | 978-0-8194-2378-8 |
| Size: | viii-768 p. / 26 cm |
| Languages: | English |
| Class number: | TECH (TECHNIQUES ET INSTRUMENTATION) |
| Keywords | Electron microscopy , Handbook , Microlithography , Nanostructure , Resins , Ultraviolet , X-rays |
Copies (1)
| Barcode | Call number | Media type | Location | Section | Status | Commentaire |
|---|---|---|---|---|---|---|
| 007090 | TECH3 RAI | papier | CNRS | TECH (TECHNIQUES ET INSTRUMENTATION) | Available |
