| Title: | HANDBOOK OF SPUTTER DEPOSITION TECHNOLOGY : Principles, technology and applications |
| Authors: | Kiyotaka Wasa, Author ; Shigeru Hayakawa |
| Material Type: | printed text |
| Publisher: | New Jersey NJ : Noyes Data Corporation, 1992 |
| Series: | Materials Science and Process Technology Series |
| ISBN (or other code): | 978-0-8155-1280-6 |
| Size: | 304 p. / 23 cm |
| Languages: | English |
| Class number: | MATE (MATERIAUX) |
| Keywords | Sputtering , Thin films |
Copies (1)
| Barcode | Call number | Media type | Location | Section | Status | Commentaire |
|---|---|---|---|---|---|---|
| 006813 | MATE3 WAS | papier | CNRS | MATE (MATERIAUX) | Available |
