| Title: | VLSI ELECTRONICS : Microstructure Science / Volume 8 : Plasma Processing for VLSI |
| Authors: | Norman G. Einspruch, Author ; Dale M. Brown |
| Material Type: | printed text |
| Publication Date: | 1984 |
| ISBN (or other code): | 978-0-12-234108-3 |
| Size: | 528 p. / 24 cm |
| Languages: | English |
| Class number: | TECH (TECHNIQUES ET INSTRUMENTATION) |
| Keywords | Chemical reactions , Electronics , Microlithography , Plasma , Thin films |
Copies (1)
| Barcode | Call number | Media type | Location | Section | Status | Commentaire |
|---|---|---|---|---|---|---|
| 005602 | TECH3 EIN8 | papier | CNRS | TECH (TECHNIQUES ET INSTRUMENTATION) | Available |
