| Title: | VLSI ELECTRONICS : Microstructure Science / Volume 6 : Materials and Process Characterization |
| Authors: | Norman G. Einspruch, Author |
| Material Type: | printed text |
| Publication Date: | 1983 |
| ISBN (or other code): | 978-0-12-234106-9 |
| Size: | 602 p. / 24 cm |
| Languages: | English |
| Class number: | TECH (TECHNIQUES ET INSTRUMENTATION) |
| Keywords | Dielectrics , Electronics , Silicon , Surface analysis , Thin films |
Copies (1)
| Barcode | Call number | Media type | Location | Section | Status | Commentaire |
|---|---|---|---|---|---|---|
| 005562 | TECH3 EIN6 | papier | CNRS | TECH (TECHNIQUES ET INSTRUMENTATION) | Available |
