Title: | VLSI ELECTRONICS : Microstructure Science / Volume 1 |
Authors: | Norman G. Einspruch, Author |
Material Type: | printed text |
Publication Date: | 1981 |
ISBN (or other code): | 978-0-12-234101-4 |
Size: | 340 p. / 24 cm |
Languages: | English |
Class number: | TECH (TECHNIQUES ET INSTRUMENTATION) |
Keywords | Devices , Electronics , Microlithography , Microscopy , Thin films |
Copies (1)
Barcode | Call number | Media type | Location | Section | Status | Commentaire |
---|---|---|---|---|---|---|
005559 | TECH3 EIN1 | papier | CNRS | TECH (TECHNIQUES ET INSTRUMENTATION) | Available |