| Title: | HANDBOOK OF ELECTRONIC MATERIALS : Volume 3. I. Silicon nitride for microelectronic applications |
| Authors: | J.t. Milek, Author |
| Material Type: | printed text |
| Publisher: | New York NY : Plenum Press, 1971 |
| Series: | Handbook of Electronic Materials, num. 3 |
| ISBN (or other code): | 306-67103-4 |
| Size: | 118 p. / 28 cm |
| Languages: | English |
| Class number: | USU (USUELS) |
| Keywords | Handbook , Physical characterisation , Silicon , Sputtering , Thin films |
Copies (1)
| Barcode | Call number | Media type | Location | Section | Status | Commentaire |
|---|---|---|---|---|---|---|
| 002002 | USU1 MOS3 | papier | CNRS | USU (USUELS) | Not for loan |
