| Title: | CHEMICAL VAPOR DEPOSITION OF REFRACTORY METALS, ALLOYS, AND COMPOUNDS : Proceedings of the conference on chemical vapor deposition of refractory metals, alloys, and compounds. Gatlinburg, Tennessee. September 12-14, 1967 |
| Authors: | A. C. Schaffhauser, Editor ; Chemical Vapor (1967-09-12/14; Gatlinburg, TN, USA) |
| Material Type: | printed text |
| Publisher: | Hinsdale IL : American Nuclear Society, 1967 |
| Size: | 458 p. / 24 cm |
| Languages: | English |
| Class number: | MATE (MATERIAUX) |
| Keywords | Chemical vapour deposition , CVD , Vapour deposition |
Copies (1)
| Barcode | Call number | Media type | Location | Section | Status | Commentaire |
|---|---|---|---|---|---|---|
| 001299 | MATE3 SCH/C | papier | CNRS | MATE (MATERIAUX) | Available |
